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Optical Measurement and Inspection with InfiniteFocus

InfiniteFocus is an optical 3D measurement device for quality assurance in the micro- and nano range. It provides all functionalities for dimensional measurements, surface analysis and characterization. Geometries with steep flanks, highly reflective properties and strong roughness are measured with a vertical resolution up to 10nm, making the instrument ideal for surface study of both homogeneous and compound materials. 3D Measurements are performed directly in the optical image.

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